For surface nano- and subnano- layers research in SINP MSU the experimental facility KG -
MEIS is created which consist of KG - 500 accelerator and MEIS chamber, equipped by a
toroidal electrostatic analyzer with a detector based on microchannel plates and special positionsensitive
collector. The given experimental complex is designed for investigation of surface
layers of samples with the depth resolution about one angstrom, using the Medium Energy Ion
Spectrometry (MEIS), based on the Rutherford Backscattering Spectrometry (RBS). In the
preprint the experimental facility is outlined, as well as a description and analysis of very first
results obtained, using the facility.
Document number: 2007 - 1/822
Authors: P.N.Chernykh, G.A Iferov., V.S.Kulikauskas, V.S.Chernysh, N.G.Chechenin, V.Ya Chumanov
Email: Vaclav@anna19.sinp.msu.ru, Chernykh-Pavel@yandex.ru , chechenin@sinp.m